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Mankhwala a Semiconductor Processes

cc09bd33a0ddd2aaadac4a8a4d3008a1Kupanga ma semiconductor kumakhala kogwirizana ndi mankhwala, ndipo mpaka 20% ya masitepe akuyeretsa ndi kukonza pamwamba pake:

Tidazolowera kunena za zinthu zomwe zimagwiritsidwa ntchito popanga wafer ngati mankhwala opangira, omwe amabwera m'njira zosiyanasiyana (zamadzimadzi ndi mpweya) ndipo amayendetsedwa mwachilungamo.Ntchito zazikuluzikulu za mankhwalawa ndi izi:

Yeretsani pamwamba pake ndi njira yonyowa yamankhwala ndi madzi a ultrapure;

Doping silicon wafers ndi ayoni apamwamba mphamvu kupeza P-mtundu kapena N-mtundu silikoni zipangizo;

Kuyika kwa magawo osiyanasiyana achitsulo ndi zigawo zofunika za dielectric pakati pa zigawo za kondakitala;

Pangani wosanjikiza woonda wa SiO2 ngati chipata chachikulu cha dielectric cha zida za MOS;

Gwiritsani ntchito plasma yowonjezera etching kapena ma reagents onyowa kuti muchotse zinthu ndikusankha zomwe mukufuna pafilimuyo;

Ma reagents amadzimadzi amadzimadzi amagawidwa m'magulu atatu: UP-S, UP, ndi EL malinga ndi chiyero chawo, ndipo EL imagawidwanso kukhala:

Zamagetsi giredi 1 (EL-Ⅰ)
ali ndi zitsulo zonyansa za 100-1000 PPb, zomwe ndizofanana ndi SEMI C1 C2 muyezo;

Electronic giredi 2 (EL-Ⅱ)
zitsulo zake zosadetsedwa ndi 10-100 PPb, zofanana ndi SEMI C7 muyezo;

Zamagetsi giredi 3 (EL-Ⅲ)
ali ndi zonyansa zachitsulo za 1-10 PPb, zomwe ndizofanana ndi muyezo wa SEMI C7;

Electronic grade 4 (EL-IV)
ali ndi zonyansa zachitsulo za 0.1-1PPb, zomwe ndizofanana ndi muyezo wa SEMI C8;

Ma reagents oyeretsedwa kwambiri komanso oyeretsedwa kwambiri amadziwika padziko lonse lapansi ngati ma process chemicals, omwe amadziwikanso kuti mankhwala onyowa, ndipo ndi amodzi mwazinthu zofunikira kwambiri pakupanga ma circuits ophatikizika (IC) ndi mabwalo akuluakulu ophatikizika (VLSI) .Amagwiritsidwanso ntchito kuyeretsa ndi kukokera pamwamba pa silicon wafer.Chiyero ndi ukhondo wa ultra-ukhondo ndi mkulu-chiyero reagents zimakhudza kwambiri pa zokolola, katundu magetsi ndi kudalirika kwa madera Integrated.Pali mitundu yambiri yamankhwala amtundu wamagetsi komanso zofunikira zaukadaulo.Zimachokera ku chitukuko cha teknoloji ya microelectronics.Ndi chitukuko cha teknoloji ya microelectronics, imapanga synchronously kapena patsogolo pa nthawi.Panthawi imodzimodziyo, imalepheretsa chitukuko cha teknoloji ya microelectronics.


Nthawi yotumiza: Jun-23-2022